JPH02119344U - - Google Patents

Info

Publication number
JPH02119344U
JPH02119344U JP2812789U JP2812789U JPH02119344U JP H02119344 U JPH02119344 U JP H02119344U JP 2812789 U JP2812789 U JP 2812789U JP 2812789 U JP2812789 U JP 2812789U JP H02119344 U JPH02119344 U JP H02119344U
Authority
JP
Japan
Prior art keywords
sample
oven
ion source
chamber
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2812789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0542603Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2812789U priority Critical patent/JPH0542603Y2/ja
Publication of JPH02119344U publication Critical patent/JPH02119344U/ja
Application granted granted Critical
Publication of JPH0542603Y2 publication Critical patent/JPH0542603Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP2812789U 1989-03-14 1989-03-14 Expired - Lifetime JPH0542603Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2812789U JPH0542603Y2 (en]) 1989-03-14 1989-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2812789U JPH0542603Y2 (en]) 1989-03-14 1989-03-14

Publications (2)

Publication Number Publication Date
JPH02119344U true JPH02119344U (en]) 1990-09-26
JPH0542603Y2 JPH0542603Y2 (en]) 1993-10-27

Family

ID=31251227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2812789U Expired - Lifetime JPH0542603Y2 (en]) 1989-03-14 1989-03-14

Country Status (1)

Country Link
JP (1) JPH0542603Y2 (en])

Also Published As

Publication number Publication date
JPH0542603Y2 (en]) 1993-10-27

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